|
Comparisons
|
Detection limit
|
Alloys composition
|
Molecular information
|
Depth information
|
|
Dynamic SIMS
|
+++
|
+
|
0
|
+++
|
|
XPS/ESCA
|
+
|
+++
|
+
|
+
|
|
TOF-SIMS
|
+++
|
0
|
+++
|
+
|
|
RBS
|
0
|
+
|
0
|
+
|
|
ECVP
|
+++
|
0
|
0
|
+++
|
|
TRPL
|
M
easurement of optical emission properties of semiconductors devices.
|
|
FIB-TEM
|
Imaging on vertical sections of integrated circuits or other structures.
|
Legend:
+++ good performance / adapted
+ limited performance / some possibilities exist
0 not adapted
|
