Dynamic SIMS   

Detection limit

Standard mass range

Profile depth

Depth resolution

Analysis area (diameter)

1ppm-1ppb

1amu-300amu

10nm-100µm

1nm-20nm

20µm-500µm

XPS/ESCA

Detection limit

Detected elements

Analysis depth (without abrasion)

Minimum analysis area (diameter)

0,1at%

All except H and He

10nm

10µm

TOF-SIMS

Detection limit

Mass range

Analysis depth (without abrasion)

Imaging spatial resolution

1ppm

1amu-10000amu

1nm

0.1µm

RBS

Detection limit

Mass range

Analysis depth

1at%

M>10amu

3nm-3µm

ECVP

Detection limit

Profile depth

Analysis area (diameter)

1ppm-1ppb

10nm-10µm

1mm-3mm

FIB-TEM