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 * What is SIMS typical use ? Mostly semiconductors : Si, SiGe, SiC, III-V (including GaN and related alloys: AlGaN, InGaN, etc), II-VI, but also metals, polymers, geological and biological samples... * What is RBS typical use ? Absolute concentration of an element in a layer (at least 0.01%) * Is SIMS quantitative ? If we talk of traces, it definitely is! Quantification requires however standards of the desired element in the material of interest. Although we possess several hundreds of such standards, we sometimes face a new case. Then we look for calibration coefficients in literature, we also call our friends from the world SIMS community. We often decide to get a new standard by ion implantation. SIMS is also able to provide quantification of major elements. * What accuracy can you reach with SIMS ? Without specific care, a 30% accuracy is obtained. This is enough for contaminants. For dopants, 10% can be obtained provided that a very systematic protocol is followed. Accuracy can be improved down to a few percent with heavier approach, often with additional cost. * What is SIMS sensitivity ? Sensitivity is SIMS's major strength. It depends on the element and on the material, due to large variations in the ionization efficiency. The detection limit is very often well below the ppm range. * What should be the samples size ? Smallest : Thanks to our Cesium micro beam source, we can perform profiling over an area as small as 8 microns in diameter at the center of a crater 50 microns x 50 microns. One application is reverse engineering on chips as small as a semiconductor laser, DEL or photodetector. This requires special mounting. On a routine base, 10mmx10mm is a comfortable size, but 3mmx3mm can do. Largest : We have a special 2 inches holder that accepts samples up to 50 mm in diameter. * Can you make profiles on insulators ? Generally speaking, charging-up occurs during SIMS analysis on insulators. However, we have ways to overcome that difficulty : we may deposit a 5nm gold layer on top for charge evacuation and/or use an electron gun for charge compensation. * What depth range can be profiled ? Shallow doping or near surface contamination takes profiling in the 10-100 nm range. Some devices need profiling depth in the 10-30 microns range. Additional charge is applied on "very deep" profiles. * Can you monitor hydrogen ? Yes, this is an easily detected element, as well as other light elements. * What is the imaging mode ? 2D image of one selected element. Image field up to 500 µm x 500 µm. * What is included in the price ? - Finding the optimal analytical conditions - Analysis and quantification from our standards - Excel files sent by E-mail - Full report. |
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