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 Imaging While profiles give quantitative information along the direction perpendicular to the surface, it is sometimes useful to know what is going on in the two other directions. SIMS provides also ionic images of the surface. The idea is simply to synchronize the rastering with detected signal of the ion of interest. The resulting image shows a lateral definition limited by the size of the probe. It can be reduced to a few microns.  Ionic image of oxygen on a patterned InP wafer The mass spectrometer keeps the spatial information. Another image mode, referred to as the microscope mode, consists in capturing the filtered ionic image. |
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