RBS (Rutherford Backscattering Spectrometry)

Rutherford Backscattering Spectrometry

A high energy beam of He⁺ ions ( energy > 2 MeV) is partly backscattered by the near surface region of the sample. These ions are analysed by a solid state detector. Both composition and depth distribution of elements in the sample can be deduced. Also, quantitative measurement of crystal damage can be obtained.

Although its sensitivity is not comparable to that of SIMS, RBS provides very valuable complementary informations :

Direct quantitative analysis (no standards needed) with detection limits down to 0.1% for heavy impurities in light matrices. Crystalline damage measurement in crystals.
Analysis of non-conducting organic or inorganic solids and powders.

Below is an example of a RBS spectrum from a TiN layer on Si substrate.
The absolute composition of TiN can be deduced accurately from this spectrum.

RBS image

Probion Analysis
37, rue de Fontenay - 92220
Bagneux - France
Tel : 33 (0)1 46 12 05 00 - Fax : 33 (0)1 46 54 10 33
info probion.fr