|
|
|
|
Sensitivity
Sensitivity, although remarkable, is limited by many
factors :
- Ionization efficiency
- Collection efficiency
- Detector efficiency
- Residual pressure (for O, H, C)
It can be improved by fast sputtering rate, at the expense of depth resolution.
Here are some typical detection limits that we obtain routinely
|
Element
|
Matrix
|
Low concentration Limit (cm-3)
|
|
O
|
GaAs
|
2E16
|
|
O
|
AlGaAs
|
8E16
|
|
C
|
GaAs
|
1E16
|
|
Si
|
InP
|
6E14
|
|
P
|
Si
|
1E15
|
|
Zn
|
InP
|
8E14
|
|
Be
|
InP
|
2E15
|
|
|
Probion Analysis
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|
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