Analysis Service for Industry and Research

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Different types of analysis: SIMS: Secondary ions mass spectrometry - TOF-SIMS: Time of flight SIMS - XPS: X-ray photoelectron spectrometry - RBS: Rutherford back scattering - ECVP: Electrochemical capacitance voltage profiling...

Different types of analysis: SIMS: Secondary ions mass spectrometry - TOF-SIMS: Time of flight SIMS - XPS: X-ray photoelectron spectrometry - RBS: Rutherford back scattering - ECVP: Electrochemical capacitance voltage profiling...

Comparisons

Detection limit Alloys composition Molecular information Depth information
Dynamic SIMS +++ + 0 +++
XPS/ESCA + +++ + +
ToF-SIMS +++ 0 +++ +
RBS 0 + 0 +
ECVP +++ 0 0 +++
FIB-TEM Imaging on vertical sections of integrated circuits or other structures.

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